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ASML says next-gen EUV tools ready to mass-produce chips, marking key shift for AI chip production

By Reuters

27 Feb 2026

SAN JOSE, California, Feb 26 (Reuters) - ASML Holding's (ASML.AS), opens new tab next-generation chipmaking machine is ready for manufacturers to start bringing it into use for production at high volumes, a senior executive told Reuters, a big step for the chip industry.

The Dutch company produces the world's only commercial extreme ultraviolet lithography (EUV) tools, which are a critical piece of equipment for chipmakers. This new tool will help chipmakers such as Taiwan Semiconductor Manufacturing (2330.TW), opens new tab and Intel (INTC.O), opens new tab produce more powerful and efficient chips, by eliminating several costly and complex steps from the chip-manufacturing process, data from ASML shows.

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